Selected Papers on Optical Methods in Surface Metrology

By David J. Whitehouse

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Topics in this volume include: comparison of interferometric contouring techniques; comparison of visibility of standard scratches; and near-grazing illumination and shadowing of rough surfaces.

Book Details

Country: US
Published: 1996
Publisher: SPIE Optical Engineering Press
Author(s):David J. Whitehouse
Language: English
Pages: 638
Categories:Technology & Engineering / Materials Science / Thin Films, Surfaces & Interfaces Technology & Engineering / Measurement Technology & Engineering / Nanotechnology & MEMS Technology & Engineering / Optics
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