The state-of-the-art of the devices and technology of elemental and compound Semiconductor materials such as GaN, AIGaN, AIGaAs, SiC are presented in various sections. Several articles in this book deal with the technologies for MEMS, nanofluidic devices and nanostructures. The recent features of device modeling and scaling for VLSI and ULSI technologies are dealt in one section.
Separate sections on emerging technologies, nanostructures, high frequency devices, and optoelectronics provide up-to-date information as well as a peep into the future trends in these areas.